Brooks Instrument's Steam Transfer Module (VDM) is a high performance, self-contained module for delivering ultra-high purity deionized water steam with high accuracy. It features an energy efficient design that produces ultra-high purity steam at low temperatures. The module uses proven steam transfer technology, combines advanced digital control and integrated diagnostics in a small, convenient housing.
VDM is designed for advanced stripping and post-etching passivation processes. Compared with flash system, it can improve accuracy, make the flow rate faster, wider control range, and lower power consumption. based on proven thermal mass flow measurement technology, VDM produces steam in the non-superheated steam phase, thereby reducing the erosion effect of deionized water, improving reliability, and improving cleaning operations.
It also provides user-friendly data logging and diagnostic functions through a separate service port and intuitive graphical user interface.
